Field
of Study
Our research emphasizes basic studies of novel thin film deposition
processes. Currently, much of our work is on chemical vapor deposition
(CVD) of diamond and related hard, wide-bandgap materials, and studies
of pulsed laser deposition of a variety of thin films.
Some of the diamond CVD topics we are interested are
-
Numerical
simulations including detailed chemistry and transport
- Optical
diagnostics of the gas-phase environment using laser-induced fluorescence
and multiphoton ionization
- Low-pressure
flame synthesis of diamond
- Diamond
growth mechanisms
- Scaling
laws for diamond CVD reactor design
- Use of
novel plasma sources for deposition of diamond, carbides, and nitrides
Our work
on pulsed laser deposition is done in collaboration with the group of
Prof. Harry Atwater. We are interested in the fundamentals of the PLD
process, including effects of reactive background gases and interactions
between the ablation plume and the substrate. We are using optical diagnostics
(laser-induced fluorescence) of the plume coupled with Monte Carlo simulations
to better understand this process.
Selected
Publications
D.
G. Goodwin and J. E. Butler, "Theory of Diamond Chemical Vapor Deposition,"
chapter in Industrial Handbook of Diamond and Diamond Films, Marcel Dekker
(to be published, 1997).
D. G. Goodwin, N. G. Glumac, and H. S. Shin, "Diamond Film Deposition
in Low-Pressure Premixed Flames," Proc. 26th Symposium (International)
on Combustion, 1996 (in press).
N. G. Glumac and D. G. Goodwin, "Diagnostics and Modeling of Strained
Fuel-Rich Acetylene / Oxygen Flames Used for Diamond Deposition,"
Combustion and Flame 105, 321 - 331 (1996).
H. S. Shin and D. G. Goodwin, "Diamond Growth in Premixed Propylene-Oxygen
Flames," Applied Physics Letters 66, 2909 - 2911 (1995).
D. G. Goodwin, D. L. Capewell, and P. H. Paul, "Planar Laser-Induced
Fluorescence Diagnostics of Pulsed Laser Ablation of Silicon," in
Film Synthesis and Growth Using Energetic Beams, MRS Symp. Proc. 388,
33 - 38 (1995).
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